SiCarrier
SiCarrier is a Chinese semiconductor equipment maker headquartered in Shenzhen. Its parent company, Shenzhen SiCarrier Technologies Co., Ltd. (深圳市新凯来技术有限公司), was founded in 2021 and is owned by a municipal state investment vehicle; an operating arm, Shenzhen SiCarrier Industry Machines, was founded in 2022 and is the entity that appears at trade shows and in customer filings [3]. The company builds tools for the front end of chip manufacturing: etch, deposition, epitaxy, annealing, diffusion, metrology, inspection and electrical test. Through a jointly owned Shanghai venture it is also connected to China's attempt to build immersion deep ultraviolet lithography scanners without ASML.
SiCarrier matters to artificial intelligence for a specific reason. China's ability to build AI accelerators domestically is gated not by design talent, which it has, but by manufacturing equipment, which it mostly does not. The Huawei Ascend dies that SMIC prints on a 7nm-class process come off lines still overwhelmingly equipped with American, Japanese and Dutch tools, and the US Bureau of Industry and Security has been narrowing access to those tools since 2019. SiCarrier is the most ambitious attempt yet to replace that toolchain end to end, and it is the company Washington has tied most directly to Huawei in a published legal document.
That tie is also the most contested thing about the company. The US Commerce Department lists "Huawei Starlight Engineering Department" among SiCarrier's aliases. Chinese corporate records show SiCarrier owned by a Shenzhen city investment vehicle. Huawei has said it is not affiliated with SiCarrier. Those three statements are not mutually exclusive, and the sections below set out who asserts what, on what date and on what evidence.
Names, structure and ownership
The company presents almost no information about itself. Its corporate website describes it as devoted to the "R&D, manufacturing, sales and service of semiconductor equipment, components, and electronic manufacturing devices," lists broad product categories, gives a Guangdong ICP filing number and a business email address, and says nothing about shareholders, executives or affiliates [17]. When the South China Morning Post looked at the site before the company's 2025 trade show debut, it found four listed products, a blank news section and a compliance statement pledging respect for third-party intellectual property [6].
What is documented sits in three places: the Chinese corporate registry, the US Entity List, and reporting by wire services and trade press.
| Entity | Role | Founded | Status on the US Entity List |
|---|---|---|---|
| Shenzhen SiCarrier Technologies Co., Ltd. | Parent company | 2021 [3] | Listed 2 December 2024 with six aliases [1] |
| Shenzhen SiCarrier Industry Machines | Operating arm; exhibits and sells | 2022 [3] | Listed as "Shenzhen Xinkailai Industrial Machinery Co., Ltd.", a separate entry with its own address [1] |
| Shanghai Yuliangsheng Technology Co., Ltd. | Immersion DUV lithography venture, jointly owned with a Shanghai state investor | 2022 [8] | Listed 2 December 2024, alias "UEASCEND" [1] |
Reuters, citing China's corporate record service Qichacha, reported in March 2025 that SiCarrier Technology is "fully owned by a state-backed investment fund in the southern tech hub of Shenzhen" [3]. Multiple accounts identify that fund as Shenzhen Major Industry Investment Group, an entity under the Shenzhen branch of the State-owned Assets Supervision and Administration Commission [4][10]. Tom's Hardware described the group as SiCarrier's main investor and noted that it also backs PengXinWei Integrated Circuit Manufacturing and SwaySure Technology, two Shenzhen chip ventures reported to be connected to Huawei [4]. The Korean trade outlet The Elec reported in May 2025 that the group wholly owns three Shenzhen fab companies, PST, PXW and SWX, and recalled that Bloomberg had reported in 2023 that the Chinese government formed the group specifically to support Huawei [10].
The Entity List gives seven addresses for the parent company: three in Longgang District, Shenzhen, plus sites in Chengdu, Hangzhou, Xi'an and Wuhan [1]. That footprint matches Tom's Hardware's description of research centres in Shanghai, Beijing, Xi'an, Wuhan, Chengdu and Hangzhou [4], and it is unusually wide for a company then three years old.
Origins and the Huawei question
SiCarrier was incorporated in 2021, at the point when US restrictions on Huawei's access to chips and chipmaking technology were tightening sharply [3][6]. Industry executives told Reuters the company "was formed out of a Huawei unit that made semiconductor tools" [2]. That sentence is the origin story as it exists in public, and it is the dispute in miniature: sourced to named reporting, plausible on the surrounding facts, unaccompanied by any corporate document recording such a transfer, and met with silence from one company and a denial from the other.
Almost everything contested about SiCarrier concerns Huawei, so the evidence is set out here by source rather than woven into a narrative.
What the US government says
The Bureau of Industry and Security added SiCarrier to the Entity List in a final rule published on 5 December 2024 and effective 2 December 2024, at 89 FR 96830 [1]. The rule added 140 entities in a single action. SiCarrier appears as "Shenzhen SiCarrier Technologies Co., Ltd., a.k.a., the following six aliases," and the six are listed verbatim as:
- Shenzhen Xinkailai Technology Co., Ltd.
- Shenzhen Xinkailai
- Xinkailai
- SiCarrier
- Huawei Starlight Engineering Department
- Huawei Starlight Department
The stated rationale covers SiCarrier and nine other entities added at the same time. BIS wrote that they "pose a significant risk of contributing to the efforts of Huawei Technologies Co., Ltd., a party on the Entity List, to support China's government's goal of indigenous production of 'advanced-node ICs' to support its military modernization" [1]. The licence requirement covers all items subject to the Export Administration Regulations, with a review policy of presumption of denial.
Two qualifications belong with that. First, BIS's finding is a risk finding under section 744.11(b) of the EAR, not a finding of corporate ownership; the agency did not assert that SiCarrier is a Huawei subsidiary. Second, the alias field records names by which BIS believes a listed party is or has been known, so that exporters cannot evade the listing by using a different name. BIS published no explanation of how it concluded that "Huawei Starlight Engineering Department" names the same entity as Shenzhen SiCarrier Technologies, and the rule contains no supporting evidence for that alias beyond its inclusion.
What Huawei says
Reuters put the question directly to Huawei for its 13 May 2025 investigation into SiCarrier's fundraising. The answer ran to one line: "Huawei said it was not affiliated with SiCarrier" [2]. In the same article, SiCarrier itself did not respond to requests for comment, nor did the Shenzhen government [2]. When the Financial Times published satellite analysis of three Shenzhen chip sites in May 2025, it noted that Huawei "has previously denied links" with SiCarrier and SwaySure [11]. Neither SiCarrier nor Huawei has publicly described any relationship between them [6].
What reporting says
The reporting runs the other way, and it is not thin.
- Reuters, May 2025: "According to industry executives, SiCarrier was formed out of a Huawei unit that made semiconductor tools." The same article reported that Huawei seconded several staff to SiCarrier from its HiSilicon chip design unit, and that some Chinese foundries were reluctant to buy SiCarrier equipment because of concerns that process parameters could reach Huawei. One source told Reuters: "The biggest problem is not the product, but that when customers use its equipment, Huawei might know their process parameters" [2].
- Financial Times, May 2025: satellite imagery showed three chip manufacturing sites built in Shenzhen since 2022. Huawei operates one, and the other two are run by SiCarrier and the memory maker SwaySure, according to people with knowledge of the matter. The FT reported that Huawei helps the other two firms raise investment and that all three share staff and technology [11].
- The Elec, May 2025: employees at the Shenzhen fabs told the outlet the sites are in fact operated by Huawei, and a source said different company names are used "to make them look like unrelated companies" [10].
- South China Morning Post, March 2025: Li Zhoujian, president of SiCarrier's metrology and inspection division, is a Huawei veteran and a member of Huawei's Representatives' Commission [5].
- Nikkei Asia, March 2025: SiCarrier has partnered closely with Huawei, which has assembled a large internal team focused on semiconductor manufacturing and equipment, working to improve process implementation across production lines [4][18].
- Reuters, March 2025, reporting SiCarrier's own trade show appearance, noted flatly that "SiCarrier also collaborates with telecoms giant Huawei, Bloomberg News said" [3].
A further claim circulates in open-source analysis of the Shenzhen cluster and is worth reproducing with its qualification attached: a published map of China's semiconductor geography credits satellite analysis by The Elec with the suggestion that one SwaySure fab runs exclusively on SiCarrier tools, which would make the Guanlan sites a proving ground for domestic equipment [19]. That map marks the linkage as reported and attributed rather than company-confirmed, and this article carries the same label. No company has confirmed it, and the underlying analysis is not readily traceable in The Elec's English archive.
How to read the disagreement
The pieces fit together without anyone lying. Shenzhen Major Industry Investment Group is a real municipal shareholder and the registry entry is real. Huawei has been on the Entity List since 2019, which makes any acknowledged ownership stake in a tool company a liability for both parties and for their customers. A structure in which a city government holds the equity while Huawei supplies engineers, demand and technical direction is consistent with the corporate record, with Huawei's denial as narrowly worded, and with what reporters have been told by people inside the fabs. It is also consistent with BIS treating "Huawei Starlight Engineering Department" as another name for the same organisation.
What is not established, and should not be asserted, is that SiCarrier is a Huawei subsidiary in any legal sense. What is equally unsupported is the claim that the two are unconnected. As of mid-2026 the position is that the equity is municipal and documented, the engineering relationship is reported by four independent outlets working from separate sources, and the denial comes from a single interested party, unaccompanied by any account of what SiCarrier is instead.
The SEMICON China 2025 debut
SiCarrier spent its first three years almost silent. That ended at SEMICON China, held in Shanghai from 26 to 28 March 2025, an event that drew about 1,400 exhibitors [3]. SiCarrier took one of the most crowded booths at the show and put roughly 30 machines on display, each carrying a code name taken from a famous Chinese mountain [2][5].
The company announced the line-up on WeChat a few days earlier, describing itself as "a core semiconductor equipment supplier" committed to developing advanced semiconductor equipment for China's chip sector [6]. According to the SCMP's account of that post, the tool families were named as follows [7]:
| Code name | Mountain | Tool category |
|---|---|---|
| Emei | Mount Emei, Sichuan | Epitaxy |
| Wuyi | Wuyi Mountains, Fujian | Etch |
| Changbai | Changbai Mountains, Jilin | Chemical vapour deposition |
| Putuoshan | Mount Putuo, Zhejiang | Physical vapour deposition |
| Alishan | Alishan range, Taiwan | Atomic layer deposition |
Reporting from the floor described a booth surrounded by what one attendee estimated at more than a thousand people during the press conference [15]. Du Lijun, president of Shenzhen SiCarrier Industry Machines, gave the remarks that made the show newsworthy outside China. Asked how China could make advanced chips without access to ASML's extreme ultraviolet systems, he said: "There might be a path where we can use non-optical technologies, that is, using our process equipment to solve some of the lithography issues," and pointed at 5nm as the target [3]. He also volunteered the catch: multi-patterning can increase the number of manufacturing steps by about 20 percent in the move from 7nm to 5nm, with corresponding pressure on yield [3].
Du, whom the South China Morning Post identifies as president of SiCarrier's process equipment division, framed the company's pitch as breadth rather than depth: "For semiconductor equipment, SiCarrier has established comprehensive capabilities spanning system architecture, hardware, components, and algorithms" [5]. Li Zhoujian, president of the metrology and inspection product line, told the show that "since its inception, SiCarrier has targeted the high-end equipment needs of domestic semiconductor manufacturers" [5]. The company marketed the products as fully domestically controllable and claimed complete localisation of core components in the metrology and inspection tools, historically a segment dominated by foreign vendors [5].
One thing was conspicuously absent. No lithography system was shown [2][4]. Nikkei reported that the company nonetheless already had lithography tools able to process 300mm wafers at 28nm and older nodes [4], and TechNode reported the same 28nm claim from the show floor, again without a machine on display [15].
Product range: what is credible and what is announced
The catalogue SiCarrier distributed at SEMICON China covers most of the front-end flow. Tom's Hardware, working from the published catalogue, listed atomic layer deposition for dielectrics and metal gates, chemical vapour deposition, physical vapour deposition for both blanket films and metal contacts, epitaxy, etch and annealing on the process side; optical inspection of patterned and unpatterned wafers, atomic force microscopy, and measurement systems for film thickness, elemental composition and crystallinity on the metrology side; and wafer electrical performance, known-good-die and functional test on the test side, the last group aimed mostly at power semiconductors [4]. The catalogue referred repeatedly to "advanced process nodes" and "future advanced nodes" without characterising individual tools against specific processes [4].
A Reuters review of 92 Chinese patents filed by SiCarrier Industry Machines and its parent between October 2022 and March 2025, searched in Anaqua's AcclaimIP database and verified by Reuters, found the same shape: wafer measurement devices, etch systems, deposition systems, components for DUV lithography systems, multi-patterning techniques, and AI-driven wafer defect recognition [2]. That range puts the company nominally against KLA, Lam Research, Applied Materials and Tokyo Electron simultaneously, an ambition broader than either NAURA or AMEC has attempted [2].
Ambition is not shipment. The evidence on production readiness is mixed and mostly discouraging:
- Two sources told Reuters in May 2025 that most of the line-up was still under development and not production-ready [2].
- Bernstein analysts wrote in a March 2025 client note: "Considering the brief period since their establishment, it seems nearly impossible for them to have developed such complex machinery and completed the extensive verification process required" [2].
- Against that, a SiCarrier manager told Reuters at the trade show that the company's tools were already in use at major Chinese foundries including SMIC; SMIC did not respond to a request for comment [3].
- TrendForce, summarising Chinese trade coverage in March 2025, reported that SiCarrier etch equipment was already in production use on power semiconductor lines at SMIC and the Hua Hong group, and that the company planned an upgraded version compatible with ASML and Applied Materials process flows by 2026 [14].
- TechNode reported an etch tool lead time of six to twelve months quoted at the show, with the products positioned against Applied Materials' Sym3 platform, and staff saying there were no immediate plans to export [15].
Two of these can be true at once. Etch and deposition tools for mature power-semiconductor lines are a genuinely easier problem than the same tools qualified for a 7nm logic flow, and a company can be selling the former while the latter is still in development.
Reuters' sources identified metrology and inspection as the segment where SiCarrier has the best chance of making a mark, on the reasoning that no dominant Chinese player has emerged there [2]. That is also the segment where the company made its loudest localisation claim [5].
The lithography effort: Yuliangsheng, SMEE and Aishengna
This is the part of the story most often reported wrongly, because three different organisations now share one engineering team and one machine design, and press accounts routinely swap their names.
SMEE (Shanghai Micro Electronics Equipment) is China's incumbent lithography maker and is not owned by SiCarrier. It prototyped an SSA600 ArF scanner in 2011 and never reached sustained commercial sales; a late-2023 claim by a shareholder that it had developed a 28nm machine was subsequently retracted [9]. Its next-generation immersion design carries the designation SSA800, and as of mid-2026 that machine had not been officially launched [8].
Shanghai Yuliangsheng Technology was founded in 2022 and is jointly owned by SiCarrier and the state-backed Chuangkewei (Shanghai) Technology [8]. This is SiCarrier's lithography exposure, and it is a joint venture rather than a wholly owned arm. In 2025 SMEE was restructured: its immersion DUV technologies and the engineers who built them moved into Yuliangsheng, while SMEE retained its extreme ultraviolet project [8]. Asia Times summarised the transfer plainly, noting that SMEE "passed the technology of SSA800 lithography to Shanghai Yuliangsheng in 2025" [8].
Shanghai Aishengna Electronic Technology Group was incorporated in August 2023 with RMB 7 billion (about US$1 billion) of registered capital, backed by Shanghai Electric Holding and a subsidiary of Shanghai International Trust [8]. Reuters named it in late July 2026, citing a single source who declined to be identified, as the state-owned firm now mass producing China's first domestic immersion DUV scanners; SMEE and Yuliangsheng, described as its shareholders, did not respond to requests for comment [9]. Yuliangsheng's engineering team is now housed inside Aishengna and continues to develop the SSA800 [8].
So the accurate statement is that SiCarrier is a co-owner of a joint venture whose engineers, together with SMEE's, now sit inside a third state-owned company that builds the machine. SiCarrier does not itself build the scanner, and the SSA800 is not a SiCarrier design. Coverage that describes an immersion scanner as SiCarrier's product, or that treats Yuliangsheng and SMEE as the same organisation, is wrong on both counts.
Where the machine stands
| Item | Status | Source |
|---|---|---|
| Reference point | Roughly equivalent to ASML's TWINSCAN NXT:1950i, launched 2008 for 28nm | Asia Times [8] |
| Gap | About four generations behind ASML's current products | Chinese commentary cited by Asia Times [8] |
| Domestic content | About 70 percent of components made in China | Media reports cited by Asia Times [8] |
| Still imported | 193nm excimer laser mirror, Zeiss lenses, vacuum chamber, synchronisation control software, ArF immersion light sources | Asia Times [8] |
| Customer trials | SMIC testing a Yuliangsheng immersion tool since September 2025, targeting 28nm production | FT, cited by Asia Times and Tom's Hardware [8][9] |
| Production plan | About 5 units in 2026, about 20 in 2027 | The Information, cited by Asia Times [8] |
| First customers | SMIC, Hua Hong Semiconductor, CXMT | The Information and Reuters, cited by Asia Times [8][9] |
| Throughput | About 150 wafers per hour, a figure ICSmart accepted | ICSmart, cited by Asia Times [8] |
| Contested claim | An online report that SMEE announced SSA800 mass production in January 2026, exhibited the machine in March and held yields stable at 90 to 95 percent was called groundless by the Chinese outlet ICSmart on 10 May 2026, which said the series had not entered a commercial wafer fab in China and appeared still to be in testing at the Shanghai Integrated Circuit R&D Center | ICSmart, cited by Asia Times [8] |
Named Chinese suppliers for the SSA800 include Nanjing Wavelength Opto-Electronic (non-objective lenses), MLOptic (300mm large-aperture lens), the Changchun Institute of Optics, Fine Mechanics and Physics (exposure system), Beijing U-Precision (dual-stage system) and NAURA Electronics (temperature control) [8].
Scale is the thing that gets lost. ASML expects to ship about 130 immersion systems in 2026, so five Chinese machines is under 4 percent of one year of ASML output [9]. The AI Futures Project's June 2026 forecast, cited by Tom's Hardware, puts a commercially viable domestic 7nm-capable immersion scanner between 2032 and 2038 with a median of 2035, and credits ASML with 98.7 percent of the immersion market today [9]. A scanner is also only one item in a matched cluster: Tokyo Electron holds roughly 89 percent of the global coater and developer track market, Chinese suppliers hold under 1 percent of the ArF immersion photoresist market specifically, and Cymer, Gigaphoton and Coherent hold more than 80 percent of ArF excimer lasers between them, with Cymer owned by ASML since 2013 [9].
The separate EUV question
Reuters reported on 17 December 2025 that a prototype extreme ultraviolet machine, built in a high-security Shenzhen laboratory by a team including former ASML engineers working under false identities, was completed in early 2025 and is generating extreme ultraviolet light but has not yet produced working chips [16]. The government target for working chips is 2028; people close to the project told Reuters 2030 is more realistic [16]. Reuters described Huawei as coordinating a web of companies and state research institutes across the country, and quoted a source saying "the aim is for China to eventually be able to make advanced chips on machines that are entirely China-made" [16].
Reuters did not name SiCarrier as the operator of that laboratory, and no published source ties the prototype to the company. The programme is noted here because it shares SiCarrier's city and because SMEE explicitly kept its own EUV project when it transferred immersion DUV to Yuliangsheng, which means China's two lithography efforts have been deliberately separated rather than merged [8].
The Entity List designation
The 5 December 2024 rule is the single most consequential document about SiCarrier, and it caught most of the domestic tool sector alongside it.
| Element | Detail |
|---|---|
| Rule | Additions and Modifications to the Entity List; Removals From the Validated End-User (VEU) Program, BIS final rule, Docket 241126-0303, RIN 0694-AJ77 [1] |
| Citation | 89 FR 96830 (pages 96830 to 96854), FR Doc. 2024-28267 [1] |
| Published | 5 December 2024; effective 2 December 2024 [1] |
| Scale | 140 entities added under China, Japan, South Korea and Singapore; 14 existing China entries modified [1] |
| SiCarrier entry | "Shenzhen SiCarrier Technologies Co., Ltd." with six aliases; licence required for all items subject to the EAR; presumption of denial [1] |
| Related entries | Shenzhen Xinkailai Industrial Machinery Co., Ltd.; Shanghai Yuliangsheng Technology Co., Ltd. (alias UEASCEND); SwaySure Technology Co., Ltd.; Shenzhen Pengxinxu Technology Co., Ltd.; Si'En Qingdao Co. Ltd.; Zhuhai Cornerstone Technology Co., Ltd.; Shenzhen Zhangge Instrument Co., Ltd.; Changguang Jizhi Optical Technology Co., Ltd.; Shanghai Feiai Technology Co., Ltd. [1] |
| Sector sweep in the same rule | NAURA and eight NAURA-named subsidiaries, two in Beijing and six regional, plus two Beijing Sevenstar entities, Piotech and affiliates, ACM Research Shanghai and its Beijing and Wuxi arms, Empyrean under its Huada Jiutian names, Skyverse entities in China and Singapore, Kingsemi Japan K.K., SMIC Advanced Technology R&D (Shanghai), and Wuhan Xinxin (XMC) with a Footnote 5 designation [1] |
Three of the entries deserve separate notice. Shenzhen Xinkailai Industrial Machinery Co., Ltd. is listed as its own entity at a room-level address inside the same Zhongkegu industrial park already listed for the parent, so the operating arm and the parent are separately designated rather than covered by one entry. Shanghai Yuliangsheng carries the single alias "UEASCEND," which is the English name used in some accounts of SiCarrier's affiliates. And SwaySure and Pengxinxu, the two Shenzhen fab ventures under the same municipal shareholder, received licence requirements extending to foreign-produced items under section 734.9(e)(3), a stricter treatment than SiCarrier's own entry received [1].
For the Entity List generally and for the wider structure of US export controls on Chinese semiconductor manufacturing, see those articles.
Funding, valuation and customers
SiCarrier's first outside fundraising became public in May 2025. Reuters reported that the Shenzhen government was seeking to sell roughly 25 percent of a SiCarrier unit at an RMB 80 billion (about US$11 billion) valuation, raising about US$2.8 billion, with interest from Chinese state-owned firms, state funds and domestic venture capital and private equity [2]. The unit on offer excluded SiCarrier's lithography assets, and Reuters was unable to establish its name [2]. Proceeds were earmarked mostly for research. Reuters spoke to ten people with knowledge of the business for that article; all declined to be identified because the company had not disclosed its plans [2].
By September 2025, TrendForce, summarising a report by the Chinese outlet Jiemian, said a second external financing round had valued the company at RMB 65 billion excluding lithography equipment, with an order book above RMB 10 billion, SMIC and Hua Hong as the largest customers, and internal projections of RMB 4.5 billion of revenue in 2025, RMB 7.5 billion in 2026 and RMB 16.9 billion in 2028, alongside an IPO plan [12]. Those projections are company-side figures reported at second hand and should be read as targets, not results.
The stated competitive goal is to overtake NAURA and AMEC and become China's leading domestic supplier of chipmaking equipment, according to four people who described the company's aims to Reuters [2]. That is a long way off. Domestically made wafer fabrication equipment accounted for 11.3 percent of total Chinese purchases in 2024 on TechInsights data, and China has spent about US$128 billion on such equipment since 2020 [2].
Limitations
The case against taking SiCarrier's catalogue at face value is substantial and comes largely from people who want China's tool sector to succeed.
Verification time cannot be compressed. Chipmaking equipment goes through long testing and qualification cycles with foundry partners before it enters production. A company founded in 2021 that unveiled thirty tool families in 2025 has not had time to complete that process for most of them, which is precisely the Bernstein objection [2].
The customer relationship is compromised by the Huawei question. Reuters reported that some Chinese foundries bought SiCarrier equipment mainly to show support for a government venture, and that others were reluctant because of trade-secret concerns [2]. Equipment vendors improve their products by working intimately with customers on real process data. If customers will not share that data, iteration slows. One source put the constraint bluntly: "If it wants to grow big, it needs to separate from Huawei completely, but even so, it will still take several years to validate and iterate the products" [2].
Multi-patterning is a real technique with real costs. Using self-aligned quadruple patterning on DUV to reach features associated with 5nm is not a trick. Intel introduced the approach in the 2010s and TSMC used it for its first generation of 7nm chips [2]. But each additional patterning step adds defect opportunities and cost. Dan Hutcheson, vice chair at TechInsights, told Reuters the technique is prone to errors and lower yields because of the added steps [2], and SiCarrier's own Du Lijun put the step-count increase from 7nm to 5nm at around 20 percent [3]. A DUV-only 7nm flow needs roughly 19 spacer-defined multipatterning masks from the front end through the second metal layer, against about ten for an EUV-based equivalent, by one published comparison of SMIC's process [9].
The lithography exposure is indirect and early. SiCarrier co-owns Yuliangsheng; Yuliangsheng's team now sits inside Aishengna; the machine they are finishing is SMEE's SSA800 design; and as of mid-2026 that machine had reportedly not entered a commercial fab [8]. SiCarrier itself has never publicly shown a lithography tool [2][4].
The public profile has since receded. SiCarrier did not attend SEMICON China 2026, held in Shanghai from 25 March 2026, as a principal exhibitor. Two units, reported as Long Sight and Qiyunfang, represented the group instead, with Qiyunfang showing proprietary EDA tools, while NAURA, AMEC, Piotech, ACM Research, SMEE and Hwatsing all exhibited under their own names [13]. A December 2025 Chinese government contract that was reported as a lithography award turned out to cover a KrF tool at 110nm [9].
Why this matters for AI
The chain runs: AI accelerators need advanced logic; advanced logic needs lithography and a matched set of etch, deposition, metrology and inspection tools; those tools are export-controlled. Huawei's Ascend 910C and its successors are fabricated by SMIC on a DUV multi-patterning flow, reportedly using imported ASML NXT:1980i immersion scanners, because EUV is unavailable [8]. That caps yield and raises cost per die. High-bandwidth memory is a second and arguably tighter constraint. Each of those bottlenecks is an equipment problem before it is a design problem.
SiCarrier is the clearest expression of the strategy China has chosen in response: build the whole toolchain domestically, accept a node or two of disadvantage, and use process equipment and clever patterning to compensate for what optics cannot do. Du Lijun's line about using "non-optical technologies" to solve lithography problems is the strategy stated out loud [3]. Whether it works is the single largest open question about the trajectory of Chinese AI hardware, and it will be answered in qualification data at SMIC, CXMT and Hua Hong rather than in trade show catalogues.
For the wider structure this sits inside, see China's semiconductor industry.
Timeline
| Date | Event |
|---|---|
| 2021 | Shenzhen SiCarrier Technologies founded, around the time US sanctions on Huawei tightened [3][6] |
| 2022 | Shenzhen SiCarrier Industry Machines founded [3]; Shanghai Yuliangsheng founded as a joint venture of SiCarrier and Chuangkewei (Shanghai) Technology [8] |
| 2023 | Bloomberg reports that the Chinese government formed Shenzhen Major Industry Investment Group to support Huawei's chip effort [10] |
| Late 2023 | SiCarrier granted a Chinese patent for multi-patterning using DUV and self-aligned quadruple patterning to reach thresholds associated with 5nm [3] |
| 2 December 2024 | SiCarrier, Yuliangsheng and 138 other entities added to the US Entity List [1] |
| 26 to 28 March 2025 | SEMICON China debut: about 30 tools shown, no lithography system; Du Lijun's remarks on non-optical routes to 5nm [2][3] |
| May 2025 | Reuters reports a US$2.8 billion raise at an RMB 80 billion valuation; Huawei says it is not affiliated with SiCarrier [2]. FT satellite analysis identifies SiCarrier as operator of one of three new Shenzhen chip sites [11] |
| 2025 | SMEE restructuring transfers immersion DUV technology and engineers to Yuliangsheng; SMEE keeps its EUV project [8] |
| September 2025 | SMIC begins testing a Yuliangsheng immersion DUV tool [8][9]. Second financing round reported at an RMB 65 billion valuation [12] |
| 17 December 2025 | Reuters reports a Chinese EUV prototype in Shenzhen, generating light but not yet producing chips; SiCarrier is not named as operator [16] |
| 25 March 2026 | SiCarrier absent as a principal exhibitor from SEMICON China 2026 [13] |
| Late July 2026 | The Information reports limited production of domestic immersion DUV scanners; Reuters names Shanghai Aishengna as the producer; ASML shares fall 13 percent over three trading days [8][9] |
See also
- China's semiconductor industry
- Huawei
- SMIC
- ASML
- Entity List
- AI chip export controls
- NAURA
- AMEC
- CXMT
- YMTC
- Hua Hong Semiconductor
- Huawei Ascend
References
- ^Bureau of Industry and Security, "Additions and Modifications to the Entity List; Removals From the Validated End-User (VEU) Program," final rule, 89 FR 96830, published 5 December 2024, effective 2 December 2024, FR Doc. 2024-28267. federalregister.gov/...idated-end-user-veu-program (full text: federalregister.gov/...2024-28267.txt)
- ^Che Pan, Julie Zhu, Fanny Potkin and Eduardo Baptista, "Exclusive: SiCarrier, Huawei partner in chips, seeks $2.8 billion in funds, sources say," Reuters, 13 May 2025 (wire text republished by SRN News). srnnews.com/...ks-2-8-billion-in-funds-sources-say
- ^Che Pan and Brenda Goh, "SiCarrier says its tools can help China make advanced chips," Reuters, 27 March 2025 (wire text republished by SRN News). srnnews.com/...-can-help-china-make-advanced-chips
- ^Anton Shilov, "China's SiCarrier challenges U.S. and EU with full-spectrum of chipmaking equipment," Tom's Hardware, 27 March 2025. tomshardware.com/...firm-makes-an-impressive-debut
- ^"China's new chip tool champion SiCarrier offers self-reliance hope amid US restrictions," South China Morning Post, March 2025. scmp.com/...elf-reliance-hope-amid-us-restrictions
- ^"Tech war: Huawei-related chip equipment maker to debut products at Shanghai trade show," South China Morning Post, 21 March 2025. scmp.com/...ker-debut-products-shanghai-trade-show
- ^"Chip tool maker SiCarrier to unveil new products at Semicon China expo," Flanders-China Chamber of Commerce, March 2025 (summarising South China Morning Post reporting). flanders-china.be/...roducts-at-semicon-china-expo
- ^Jeff Pao, "China's DUV lithography still lags ASML by four generations," Asia Times, 31 July 2026. asiatimes.com/...ill-lags-asml-by-four-generations
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Fact-checks are independent of edits: a reviewer re-verifies the article against its sources and stamps the date. How we verify
Reviewer note: Independently fact-checked on 2026-08-01. The Entity List entry was confirmed with all six aliases, including both Huawei Starlight names, along with the seven addresses and the separate listings for Xinkailai Industrial Machinery and Shanghai Yuliangsheng. The article's account of the lithography chain agrees with the SMEE article and with the underlying reporting. Two corrections were applied to an entity count and an address description.